The national standard "Technical Requirements for Air Chemical Pollution Control in Cleanrooms and Related Controlled Environments"GB/T 36306-2024 was proposed and managed by the National Technical Committee for Standardization of Cleanrooms and Related Controlled Environments (SAC/TC 319), and was jointly drafted by China Electronics Engineering Design Institute Co., Ltd., China Electronics System Engineering Third Construction Co., Ltd., China Electronics System Engineering Second Construction Co., Ltd., Institute of Atmospheric Physics, Chinese Academy of Sciences, Shenzhen Esky Purify Technology Co., Ltd., Tianjin University and other units. It was first published as GB/T 36306-2018 in 2018, and this is the first revision.

This document replaces GB/T 36306-2018 "Guidelines for the Control of Air Chemical Contamination in Cleanrooms and Related Controlled Environments"and is consistent with GB/T Compared with 36306-2018, in addition to structural adjustments and editorial changes, the main technical changes are as follows:

a) The scope of application of the standard has been changed (see Chapter 1, Chapter 1 of the 2018 edition);

b) Terms such as air molecular pollution, environmental response monitoring method, pollutants, and gas phase air purification devices have been deleted (see 3.1, 3.2, 3.3, and 3.4 of the 2018 edition);

c) Terms such as air cleanliness and released gas according to chemical concentration have been added (see 3.1 and 3.3);

d) The definition of air chemical pollutants has been changed (see 3.2, 3.5 of the 2018 edition);

e) The source of pollution sources has been changed and added (see 4.1, 4.2, 4.1 of the 2018 edition), and classification and classification have been deleted (see 4.2 of the 2018 edition);

f) General requirements, design, construction, operation and maintenance and other air chemical pollution control contents have been added (see 5.1, 5.2, 5.3, 5.4), deleted the content of determining whether there is pollution and the situation and control measures (see 6.1, 6.2 of the 2018 edition);

g) Change the title "Detection"to "Detection and Monitoring"(see Chapter 6, Chapter 5 of the 2018 edition), change the content of detection (see 6.1, 5.1, 5.2 of the 2018 edition), and add the content of monitoring (see 6.2).

The air chemical pollution control technology in this document is mainly aimed at cleanrooms and related controlled environments with air chemical pollution control requirements. The molecular size of air chemical pollutants ranges from 0.1nm to 3nm. Under normal conditions, they exist in the form of gas or vapor. Conventional high-efficiency filters and ultra-high-efficiency filters cannot effectively remove them, and particle counters cannot detect them.

There are many types of air chemical pollutants, and different pollutants have different chemical properties. The concentration of some pollutants can change with the temperature and humidity of the environment, and the source of pollutants is very random. With the development of purification technology and materials, air chemical pollutants can be effectively controlled and removed, ensuring that air chemical pollutants in cleanrooms and related controlled environments meet environmental limit requirements.

International Roadmap for Devices and Systems (IRDS) Wafer Environmental Contamination Control Data Sheet

As a comprehensive solution provider for clean technology applications, Esky Purify's solutions are widely used in many fields such as electronics and semiconductors, providing a stable, compliant, and green clean environment for many customers. In the future, it will continue to participate deeply in the construction of framework standardization, actively promote the implementation of standards, promote the high-quality development of the clean industry, and escort high-end process technology.