Cleanroom testing process

Where the determination of all the instrumentation used in the identification, calibration or calibration must be carried out in accordance with the provisions. Before the determination, the system, Cleanroom, machine room, etc. must be a comprehensive cleaning;in the cleaning and system adjustment, must be run continuously for a period of time and then the determination of leakage and other items.

(i) The procedure for cleanroom determination is roughly as follows:

1, fan air blow

2. Indoor cleaning

3. Adjust the airflow

4, an intermediate-effect filter

5, an efficient filter

6. System operation

7, high-efficiency filter leakage detection

8. Adjust the airflow

9, adjust the indoor static pressure difference

10, adjust the temperature and humidity

11, Single-phase flow Cleanroom cross-section average velocity, velocity inhomogeneity determination

12. Indoor cleanliness measurement

13. Determination of indoor planktonic and sedentary bacteria

14. Work and adjustments related to production equipment

(II) Basis of Testing

Includes specifications, drawings, design documents, and technical information on equipment in the following two categories.

1, design documents of design category, supporting documents for design changes and related agreements, as-built drawings.

2. Technical data of the equipment.

3, "Clean Plant Design Code"GB50073-20012, construction and installation category "Ventilation and Air Conditioning Engineering Construction Quality Acceptance Code"GB50243-2002

02Methods of detection and determination of results

(I) Test of wind volume or speed

1,Sampling for testing of areas with design requirements.

2,Air volume and wind speed must first be tested on the purification of various effects of air conditioning, and must be in the design of the air volume and wind speed conditions obtained.

①The measured air volume of the turbulent flow Cleanroom system should be greater than the respective design air volume but should not exceed 20%;the difference between the measured fresh air volume and the designed fresh air volume should not exceed ±10% of the designed fresh air volume;the difference between the indoor air volume of each air outlet and the respective design air volume should not exceed ±15% of the designed air volume.

② unidirectional flow laminar flow Cleanroom measured average indoor air velocity should be greater than the design air velocity but should not exceed 20%;the total measured fresh air and the design of the difference between the new air volume should not exceed the design of the new air volume of ± 10%

3. Operation Process and Judgment

①Turbulent flow Cleanroom 

a. For air outlets without filters, can be carried out in accordance with the comprehensive effectiveness of the general ventilation and air conditioning air outlet air volume test method.

b. For air vents with filter, according to the form of the air outlet can be used to select the auxiliary duct. That is, made of rigid plate with the same cross-section of the air inlet, the length is equal to 2 times the length of the air inlet side of the straight pipe section connected to the outside of the filter air outlet in the auxiliary duct outlet plane, according to the minimum number of measurement points not less than 6 points evenly arranged measurement points, with a hot ball anemometer to determine the wind speed of each point, the average wind speed of the air inlet cross-section multiplied by the air inlet to determine the wind volume of the net cross-sectional area.

c. For air vents with similar diffuser panels, can be based on the diffusion plate air resistance curve and the measured diffusion plate resistance, find out the air measurement with a micro-pressure gauge and Bitou or with a fine rubber tube instead of Bitou, but must make the measurement hole plane perpendicular to the direction of the airflow so that the measured value correctly reflects the static pressure value. Measured value correctly reflect the static pressure value.

d. Measurement of airflow by the hood method

When the air velocity of each air outlet is measured by the air volume hood, the corresponding outlet air velocity isVs=As.

Vs------the average air velocity of each terminal filter or air supply diffuser m/s;

Qs------air supply volume m3/s for each terminal filter or air supply diffuser;

As------air supply outlet air area m2.

②Unidirectional flow -laminar flow Cleanroom  

Unidirectional flow cleanroom using room cross-section average air velocity and cross-sectional area product method to determine the amount of air supply Among them, vertical unidirectional flow laminar flow Cleanroom to determine the cross-section from the ground 0.8m horizontal cross-section, horizontal unidirectional flow laminar flow Cleanroom to take from the air surface 0.5m vertical cross-section, cross-section on the point spacing should not be greater than 2m, the number of points should be measured not less than 10, uniform arrangement of the instrument with a hot bulb anemometer.

③Measurement of the air volume in the duct 

3) Determine the air volume in the duct  align:justify;text-justify:inter-ideograph;line-height:21px"> 

For long branch pipe sections on the upwind side of the air outlet, which have been or can be perforated, the duct method can be used to determine the Air volume, determine the section from the local resistance components distance in the local resistance components after not less than 5 times the diameter of the pipe or 5 times the length of the big side.

For rectangular ducts, divide the measured cross-section into a number of equal small sections, each as close as possible to the length of the square, preferably no larger than200 mm. Greater than 200mm measurement point, set in the center of the small cross-section, but the number of measurement points on the entire section should not be less than three.

For round ducts, the measurement section should be divided and the number of measurement points should be determined according to the equal-area circle method. Specifically can be measured according to the comprehensive effectiveness of ordinary ventilation and air conditioning duct method of measuring air volume.

(ii) Test of indoor static pressure difference

1, Instrumentation and Environmental Measurement Instruments Inclined micromanometer, digital micromanometer, etc. Ambient temperature at room temperature or at design temperature.

2,Sampling is performed on each adjacent area with design requirements.

3,Differential static pressure test results shall comply with the following provisions.

①The static pressure difference between adjacent Cleanrooms of different levels and between Cleanrooms and non-Cleanrooms shall be not less than 5 Pa.

②The difference in static pressure between the Cleanroom and the outdoor area should be more than 10Pa.

③ Cleanliness is higher than 100 levels of unidirectional flow laminar flow Cleanroom in the open state at the entrance and exit of the indoor side of the 0.6m should not be measured more than the upper limit of indoor level of concentration.