Particle contamination in liquids has a significant impact on product quality. In addition, the characteristics of particles suspended in liquids in people's consumer lives also have an impact on humans, so the control of particles in liquids has become particularly important in various fields. The liquid particle real-time online monitoring system can conduct real-time dynamic monitoring of the user's liquid flow path and generate reports for problem finding and analysis. It is an indispensable part of the user's production management.

Main application areas

Liquid particle counters are mainly used to control particles of chemical species, such as SOG (spin-on glass) and photoresist materials used in semiconductor manufacturing, ultrapure water and cleaning chemicals (such as alkali, organic solvents and hydrofluoric acid). In addition, they can also detect large-particle grinding liquids in chemical mechanical polishing.

Special Gas Particle Monitoring System

Many raw material gases used in product processing for semiconductor, flat panel display, solar cell and other industries are toxic, flammable, corrosive and reactive. For example, these gases react with water vapor to easily generate particulate matter. It is necessary to control these reactions to suppress particle contamination in special gases.