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TSI Remote Particle Counter 7110

TSI Remote Particle Counter 7110

TSI AeroTrak 7110 型远程粒子计数器的检测精度可低至 0.100 μm !这款仪器采用具有提高的信噪比的专利 HeNe 激光技术实现。此款仪器专用于无尘室监测、处理工具监测及过滤器测试应用领域。此外,由于此款粒子计数器与外部真空源一起使用···...
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TSI AeroTrak Model 7110 Remote Particle Counter detects down to 0.100μm! This instrument uses patented HeNe laser technology with an improved signal-to-noise ratio. This instrument is designed for cleanroom monitoring, process tool monitoring, and filter testing applications. And because this particle counter is used with an external vacuum source, there is great flexibility in placing and configuring the system.

Particle count data can be easily and continuously transmitted to TSI FMS 5. Especially when it is integrated with the FMS 5, you have a powerful productivity tool with features such as statistical process control. These particle counters can also store up to 2000 sample records, providing data redundancy.

The Model 7110 meets all the stringent requirements specified in ISO 21501-4. It is calibrated with NIST traceable PSL spheres and uses the recognized standard for particle detection, TSI's world-class classifiers and condensation particle counter standards


Features and Benefits

Accurately detect particles as small as 0.100μm

0.100 to 10.0μm Particle Size Range

Up to Eight Channels of Simultaneous Data

1.0 CFM (28.3 L/min) Flow Rate

Meets all requirements of ISO 21501-4

Uses enhanced HeNe laser

Highly repeatable and reliable detection / Data

2000 sample record storage

Ethernet Modbus?RTU, RS-485 Modbus RTU, or analog output

Easy-to-read status indicators

Easy to integrate with equipment monitoring systems

Stainless steel housing

Easy to use with external vacuum pump

One-year warranty


Technical parameters

Accurate detection as low as 0.100 μm

0.100 to 5.0 μm Particle size range

Up to eight channels of simultaneous data

1.0 CFM (28.3 L/min) flow rate

Complies with ISO 21501-4 All requirements in the standard


Scope of application

Filtering test

Continuous particle contamination monitoring

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