Gaseous Molecular Level Pollutants (AMC) have become a major problem affectingone of the main factors affecting product yields, especially in the electronics and semiconductor industries, where the AMCs generated and retained during the construction of the production plants are often used as the main source of waste. In particular, in the electronic semiconductor industry, the AMCs generated during the construction and residual and manufacturing processes will erode the plant and process equipment materials through physical and chemical reactions, ultimately affecting or even changing the normal process, and greatly reducing product yields.

1. AMC Source

AMC sources of pollution are divided into two major parts

1. Outdoor Atmosphere:Mainly from the external environment of the gas phase pollutants, such as industrial emissions inside and outside the plant, automobile exhaust, volatilization from the natural environment, etc.

2. Indoor Environment:Mainly from plant construction and temporary materials (such as epoxy, coatings, paints, glues and glues, plastic products, etc.), construction processes (such as welding, heat fusion, cutting and grinding, etc.), indoor personnel, and the process of production of gases or chemicals in the process of leakage, emanation, volatilization, etc.

2. AMC Classification

AMC AMCs are complex, come from a wide range of sources, and are difficult to control. According to the standards issued by SEMI, AMCs are classified into four categories:

1. Acidic molecular pollutants:such asHF, SO2, CL2, etc.;

2. Alkaline molecular pollutants:such asNH3, etc.

3. Organic compounds:such asSiH4, hydrocarbons, etc.

4. Adulterants:such as phosphorus (P) and boron (B).

3. AMC Control

1. Pollution source control:By testing and analysis to identify the sources of pollutants and take measures to control the sources and reduce the generation and release of AMCs;

2. Ventilation Control:Introduces clean air and exhausts or dilutes polluted air;

3."Eradication"control:The most widely used and proven method of controllingAMC in the industry today is generally:controlling and removing contaminants through physical adsorption or chemical reaction.

WithChemical FilterThe Chemical ReactionsThe eradication of AMC controlis a highly recommended method by the industry and its results are highly trusted. ItChemical reactions can occur between pollutants and chemicals in the adsorbent to remove pollutants, and it is through this principle that Esky Purify filter media is realized. Compared with physical adsorption, this chemical adsorption is more efficient and will oxidize the toxic and harmful gases into harmless solids through chemical reaction.

4. Product Selection

By detecting and identifying the specific airborneAMC types and concentrations in the air, EVERGREEN PURIFICATION can customize the filter media and associated solutions for each environment.

Everyday Purification chemical filters for AMC control elements:

1. Efficiency:高效过滤，比传统活性炭更广谱去除气态分子污染物

2. Compatibility:Simple installation, can be easily installed in existing air conditioning units, a variety of specifications. Different sizes and shapes can be customized according to customers' needs.

3. Pressure loss:Low resistance, no incremental pressure loss, energy saving

4. Cleanliness:Removal of gaseous pollutants through the chemical reaction method, the gaseous pollutants and the filter media have a chemical reaction, effectively eliminating the air environment of the The filter media reacts with the gaseous pollutants, effectively eliminating the secondary pollution of the air environment and permanently removing the gaseous pollutants.

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5. AMC Monitoring

When AMC is decided to be controlled and practiced regardless of the useof the AMCs. span>whichControl methods must be able to monitor whether the environment meets the specified AMC control criteria, including the final control of the clean space and the filtration system at all levels.

AMC Chemical Pollutant Online Monitoring System

亿天净化提供的AMC化学污染物控制综合解决方案中, will utilize the relevant intelligent online monitoring system to monitorClean Room AMC content concentration in some areasEnvironmental parametersFor real-time monitoring, to grasp the trend of air cleanliness in real time, andAny single out-of-control anomaly is required to make a pollutanttake steps to remove possible bad operations, sources of contamination, and contamination events before they can have an adverse effect on the process or product.