芯片是所有电子工业的基础，对人类社会影响极其巨大，With the continuous development of semiconductor technology, the size of the chip line width is constantly shrinking. As semiconductor technology continues to evolve, chip line widths are shrinking, processes are becoming more complex and cumbersome, and many critical processes (e.g., photolithography) need to be carried out in specific clean environments. In addition to controlling the concentration of conventional suspended particulate contaminants, the concentration of smaller diameter gaseous molecular contaminants (AMCs) in the clean room needs to be strictly controlled.

In order to controlAMC, clean plants producing chips generally install chemical filters on the fresh air handling units (MAUs) and fan filtration units (FFUs) to provide relevant air treatment for specific areas within the clean plant.

1. Fresh air handling unit (MAU) with chemical filter

The air filtration system in a cleanroom has a fresh air air handling unit, which is the primary air handling unit used to provide filtered outdoor air. The outside air that enters the MAU is supplied by an external source (e.g., air from outside the building containing the cleanroom), and the outside air typically passes through a significant pre-filtration system, and then the air is conditioned by heating, ventilation, and air conditioning (HVAC) equipment.

The fresh air handling unit is the most direct and effective location to install chemical filters in order to control contaminants from outside the purification facility.The filtration system in the MAU unit does not affect contaminant sources inside the facility, and since the outside ambient air passes through these filters only once, it requires High AMC filtration efficiency, chemical filters are effective in removing toxic and hazardous gases from the outside air, thus ensuring that the air entering the room is up to standard.

2.Fan Filtration Unit (FFU) Installation of Chemical Filters

In the microelectronics industry, due to the increasingly stringent control of AMCs increasingly stringent, it is difficult to meet the requirements for AMC control only in the air conditioning box. Installing chemical filters in FFUs is a way to create localized ultra-clean environments, and chemical filters have proven to be particularly effective when used in conjunction with FFUs, which are typically used to filter gaseous contaminants from the circulating air in a clean room.

FFFU chemical filters are generally installed in the FFU in the HEPA/ULPA upstream position, used for the effective installation of HEPA/ULPA. The FFU chemical filters are typically installed upstream of the HEPA/ULPA in the FFU for effective AMC removal. depending on the variety of hazardous gases present in the cleanroom workspace, each chemical filter for the FFU can be customized to use a different type of media to remove its associated hazardous gases.

常用的化学过滤器

常用的化学过滤器

①Plate Plate Chemical Filter 

②W-type chemical filter

③box chemical filter

④Cylindrical Chemical Filtration Module

⑤V-Type Chemical Filtration Module

Product Features

? Easy to install and operate;

?High efficiency over rate, more broad-spectrum targeted removal of gaseous molecular pollutants than traditional activated carbon;

? Low resistance, no incremental pressure loss. Energy saving and environmental protection;

?No dust release, with some dust filtration effect;

? Improve and enhance indoor air quality;

? Long service life, remove gaseous pollutants by chemical reaction method, gaseous pollutants and filter media chemical reaction, effectively eliminate secondary pollution of the air environment, permanent removal of gaseous pollutants.

Chemical filters can effectively controlAMC, EVERGREEN PURIFICATION has always been known for providing high-quality products and services, a variety of types of chemical filters through the reasonable configuration can achieve the best results in removing contaminants, to protect sensitive electronic and semiconductor processes from AMC contaminants. The AMC filter can be configured to remove contaminants and protect sensitive electronic and semiconductor processes from AMC contaminants, thereby improving product quality and yields.

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