In the production of semiconductors for the process of manufacturing environment requirements are stringent, any small impurities, may be triggered by production failures, serious damage to product quality, especially gaseous molecular contaminants(AMC). Therefore, for Online monitoring of gaseous molecular contaminants(AMCs) has become an essential part of the production process in the semiconductor industry.

However, traditional analytical methods often require time-consuming processes such as sampling and sample preparation, and are simply not able to provide results in a short period of time, resulting in semiconductor factories not being able to intervene in a timely and effective manner.

So with ultra-high sensitivityEsky PurifyAMC Chemical Pollutant Online Monitoring System, in order to be suitable for the semiconductor industry.

01. What is AMC Chemical Pollutant Online Monitoring System

系统可对洁净区域中的环境进行AMC监测，AMC监测器型号:ESKY-OGSMART，配合信号控制箱，监测服务器电脑，软件，多路采样器以及根据厂房的实际情况配全相应的数据线电源线等辅材，可实现环境中的AMC实时监测显示、存储、历史查看 The AMC real-time monitoring display, storage, historical view, graphical analysis and other functions can be realized.

02. Advantages of AMC chemical pollutant online monitoring system

-Establishment of an early warning system for AMC corrosion rate monitoring by ESKY-OGSMART monitoring instrument;

-Customized chemical filters through sampling and analysis to control AMC through recirculated air systems, turning harm into good;

-Provides real-time online historical data viewing and data icon trend analysis;

-Integrated Liquid Crystal Display interface for quick feedback and data retrieval;

-Remote control with TCP/IP and 485 connectivity to existing host computers.

03. Functions of AMC online monitoring system for chemical pollutants

The AMC online monitoring system for chemical pollutants will be Concentration of AMC content in some areas of the clean roomand other environmental parametersfor real-time monitoring, to grasp the trend of air cleanliness in real time, andAny time out-of-control anomaly before the pollutant Taking steps to remove possible bad operations, sources of contamination and pollution events before they may have an adverse effect on the process or product.