Pollution control solutions for monitoring ultra-clean semiconductor environments (I)
- 2023-02-13
- 1969
- Esky Purify
semiconductor manufacturing
Semiconductor Manufacturing
Semiconductor shortages and competition for smaller process nodes in semiconductors. The shortage of integrated circuits (ICs) requires more output from the manufacturing process, so industry leaders are competing for smaller process nodes. These challenges require airborne particle contamination monitoring to ensure risk-free products, increased yields (product yield), and successful cleanliness audits.TSI provides complete environmental monitoring solutions from nanoparticles to submicron particles with our highly sensitive particle counters to meet the semiconductor shortage and competition for smaller process nodes.
The TSI 10 nm Cleanroom Coalescing Particle Counter (CPC) and 0.1 μm Particle Counters (Handheld Particle Counters and Remote Particle Counters) are the optimal combination to meet the critical needs of the semiconductor industry.
TSI has been providing high sensitivity particle counters for over 60 years, longer than any other particle counter company, and TSI instruments are used in national standards laboratories around the world that demand superior accuracy, repeatability and reliability. Never compromise on any manufacturing process -trust TSI to monitor everything.
Unique 10nm measurement
0.1 μm dust particle counters can't detect nanoscale particle contaminants -you need a CPC (Coalescing Particle Counter). Utilizing our decades of experience in CPC technology, the TSI AeroTrak®9001 Cleanroom Condensation Particle Counter (CPC) is designed to provide reliable, real-time nanoparticle detection for ultra-clean semiconductor manufacturing, with a 0.1 CFM flow rate for detecting particles in air or inert compressed gas.