RION/Japan RION Liquid Particle Counters detect a wide range of liquids from pure water to hydrofluoric acid. Liquid counters are used to control particles in chemicals such as specialized materials for semiconductor processes such as SOG and photoresist materials, ultrapure water and cleaning chemicals such as alkalis, organic solvents and hydrofluoric acid. In addition, abrasives with large particle sizes for chemical mechanical polishing can also be tested, both on-line and off-line.

Featured Benefits

Tests abrasive fluids with large particle sizes in chemical-mechanical polishing with both on-line and off-line testing methods.

Technical Parameters

Light source Laser diode (wavelength: 790nm, rated output: 4.5mW)

Materials of sample-contact parts Capillary tube: artificial quartz; Sampling tube: borosilicate glass, PTFE;

Sampling pump: Kel-F (PCTFE) , PTFE; Pipeline connector: PFA, PTFE, PTFE, PTFE, PTFE< span style="text-wrap: wrap;">, PCTFE, Perflo; .

Flow rate 25 ml/min (10 ml/min is factory customized)

Measurement Range Anywhere from 1-20 channels ,  1.3~100μm (0.1μm interval)

Maximum number of particles 10,000 particles/ml (Error value less than 10%)

Power Supply 100V-240V AC,50/60Hz 80VA

Dimensions. Weight 366(H) X 360(W) X 236 (D) mm,Approx:10kg