RION/Japan's liquid particle counter can detect a variety of liquids from pure water to hydrofluoric acid. Liquid counters are used to control particles in chemicals, such as special materials in semiconductor processes such as SOG and photoresist materials, ultrapure water and cleaning chemicals such as alkali, organic solvents and hydrofluoric acid. In addition, it can also detect large-particle grinding liquids in chemical mechanical polishing, and the test methods include online and offline testing.

Technical parameters

Light source laser diode (wavelength: 780nm, rated output: 40mW)

Laser material KS-42B artificial quartz PFA PTFE

KS-42BF sapphire PFA PTFE (measurable hydrofluoric acid)

Flow rate 10ml/min

Particle size range (5 channels, standard configuration);    ≥0.2μm;   ≥0.3μm;  ≥0.5μm; ≥1μm;  wrap;">≥2μm  

Optional channels 1-10 channels, set by the controller, setting range: 0.2~2μm

Number of particles 1200 particles/ml

Power supply DC12V (supplied by KE-40B1)

Size.Weight 125 (H) X  240 (W) X 151 (D) mm, approx. 3.2kg