RION/Japan RION Liquid Particle Counters detect a wide variety of liquids from pure water to hydrofluoric acid. Liquid. Liquid counters are used to control particles in chemicals such as specialized materials for semiconductor processes such as SOG and photoresist materials, ultrapure water and cleaning chemicals such as alkalis, organic solvents and hydrofluoric acid. In addition, abrasive fluids with large particle sizes for chemical-mechanical polishing can also be tested, both on- and off-line.

技术参数

Light source laser diode (wavelength: 780nm, rated output: 40mW)

Laser Material KS-42B Synthetic Quartz PFA PTFE<

KS-42BF Sapphire PFA PTFE (hydrofluoric acid measurable)

Flow rate 10ml/min

Particle size range (5 channels, standard);    ≥ 0.2μm;   ≥0.3μm;  ≥0.5μm; ≥1μm;  ≥2μm  

Optional channels 1-10 channels, set by the controller, setting range: 0.2~2μm. span>

Particle Count 1200pcs/ml™ lt;/span>

Dimensions. Weight 125(H) X  240(W) X 151(D) mm, Approx:3.2kg