RION/Japan RION Liquid Particle Counters detect a wide range of liquids from pure water to hydrofluoric acid. Liquid. Liquid counters are used to control particles in chemicals such as specialized materials for semiconductor processes such as SOG and photoresist materials, ultrapure water and cleaning chemicals such as alkalis, organic solvents and hydrofluoric acid. In addition, abrasive fluids with large particle sizes for chemical mechanical polishing can also be tested, both online and offline.

Technical parameters

Light source laser diode (wavelength:830nm, rated output:200mW)

Laser Material KS-42A Synthetic Quartz PFA

KS-42AF Sapphire PFA (Hydrofluoric Acid Measurable)

Flow rate 10ml/minute

Particle size range (5 channels); ≥ 0.1μm; ≥0.15μm;≥0.2μm; ≥0.3μm; ≥0.5μm  (Optional ≥1.0μm)

Optional channels 1-10 channels, set by the controller, set the range:0.1 to 10 channels. Range:0.1,0.13~0.5μm

Particle count 1200pcs/ml

Power Supply DC12V (supplied by KE-40B1)

Dimensions. Weight 125(H) X 240(W) X 151(D) mm,Approx:4kg