RION/Japan RION Liquid Particle Counters detect a wide range of liquids from pure water to hydrofluoric acid. Liquid. Liquid counters are used to control particles in chemicals such as specialized materials for semiconductor processes such as SOG and photoresist materials, ultrapure water and cleaning chemicals such as alkalis, organic solvents and hydrofluoric acid. In addition, abrasive fluids for large particle sizes in chemical mechanical polishing can also be tested, both on-line and off-line.

Featured Advantages

Optical Mode Side Scatter Mode

Light Source Semiconductor. Solid-state laser (output 800mW, wavelength 532nm)

Contact material Sapphire, PFA

Particle Size Measurement Range 0.03μm~0.13μm+

Particle size range 1 point~10 points arbitrary setting