RION/Japan's Liquid Particle Counters detect a wide range of liquids from pure water to hydrofluoric acid. Liquid counters are used to control particles in chemicals such as specialized materials for semiconductor processes such as SOG and photoresist materials, ultrapure water and cleaning chemicals such as alkalis, organic solvents and hydrofluoric acid. In addition, abrasive fluids with large particle sizes for chemical mechanical polishing can also be tested, both on-line and off-line.

FeaturesAdvantages

Light source laser diode (wavelength:780nm, rated output:5mW)

Laser material Synthetic quartz PFA PTFE

Flow rate 10ml/min

Particle size range (7 channels ≥1μm;    nbsp;≥2μm;   ≥3μm;   ≥5μm; ≥10μm; ≥20μm 

Optional channels 1-10 channels, set by the controller, setting range:0.5~20μm

Particle count 1200pcs/ml

Power supply:1-10 channels, set by controller, range:0.5~20μm

Power Supply DC12V (supplied by KE-40B1)

Dimensions. Weight 125(H) X 240(W) X 151(D)mm,Approx:3.2kg