RION/Japan RION Liquid Particle Counters detect a wide variety of liquids from pure water to hydrofluoric acid. Liquid. Liquid counters are used to control particles in chemicals such as specialized materials for semiconductor processes such as SOG and photoresist materials, ultrapure water and cleaning chemicals such as alkalis, organic solvents and hydrofluoric acid. In addition, abrasive fluids with large particle sizes for chemical-mechanical polishing can also be tested, both on-and off-line.
Light Source Laser Diode Pump/Solid State Crystal Laser (Wavelength:532nm, Rated Output:500mW)
Laser Material Sapphire,PFA
Flow rate 10mL/min
Particle size range (4-channel, standard) ≥0.04μm;≥0.08μm;≥0.1μm;≥0.15μm
Optional channels 1-10 channels, set by the controller, setting range:0.04~0.15μm
Particle count 30000pcs/ml
Power supply DC12V (supplied by KE-40B1)
Power supply DC12V (supplied by KE-40B1 supply)
Dimensions. Weight 147(H) X 272(W) X 442(D)mm, About weight:12kg
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