RION/Japan's Liquid Particle Counters detect a wide range of liquids from pure water to hydrofluoric acid. Liquid counters are used to control particles in chemicals such as specialized materials for semiconductor processes such as SOG and photoresist materials, ultrapure water and cleaning chemicals such as alkalis, organic solvents and hydrofluoric acid. In addition, abrasive fluids with large particle sizes for chemical mechanical polishing can also be tested, both on-line and off-line.

FeaturesAdvantages

Light Source Laser Diode Pump/Solid State Crystal Laser (Wavelength:532nm, Rated Output:500mW)

Laser Material Sapphire,PFA

Flow rate 10ml/minute

Particle size range (4 channels) ≥0.05µm,≥0.1µm,&ge. 0.15µm,≥0.2µm standard

Optional channels 1-10 channels, set by the controller, setting range:0.05~0.2µm

Particle number 15000 particles/ml

Power supply DC12V (supplied by KE-40B1)

Dimensions. Weight 147×272×442mm, About:12kg