RION/Japan's RION liquid particle counter can detect a variety of liquids from pure water to hydrofluoric acid. Liquid counters are used to control particles in chemicals, such as special materials in semiconductor processes such as SOG and photoresist materials, ultrapure water and cleaning chemicals such as alkali, organic solvents and hydrofluoric acid. In addition, it can also detect large-particle grinding liquids in chemical mechanical polishing, and the test methods include online and offline testing.
 

Features and advantages

Light source laser diode (wavelength: 780nm, rated output: 5mW)

Laser material artificial quartz PFA Perfluoro

Flow rate 25ml/min

Particle size range (8 channels, standard configuration); ≥2μm;   ≥3μm;   ≥10μm;   ≥25μm;   ≥50μm;   ≥100μm

Optional channels 1-10 channels, set by the controller, setting range: 2~100μm

Number of particles 10000 particles/ml

Power supply DC12V (supplied by KE-40B1)

Size.Weight 125 (H) X 240 (W) X 150 (D) mm, About：3 kg