RION/Japan's Liquid Particle Counters detect a wide range of liquids from pure water to hydrofluoric acid. Liquid. Liquid counters are used to control particles in chemicals such as specialized materials for semiconductor processes such as SOG and photoresist materials, ultrapure water and cleaning chemicals such as alkalis, organic solvents and hydrofluoric acid. In addition, abrasive fluids with large particle sizes for chemical-mechanical polishing can also be tested, both on-and off-line.

Featured Benefits

Particle size range (4 channels, standard); ≥0.04μm;≥0.08μm; ≥0.1μm; ≥0.15μm

Optional channels 2-10 channels, set by the controller, setting range:0.04~0.15μm

Particle count 15000pcs/ml, error value lower than 10%

Technical Parameters

Light source laser diode pump/solid-state crystal laser (wavelength:532nm, rated output:500mW)

Materials in contact with the sample Artificial quartz, fluorocarbon rubber, fluorine rubber, PMC

Exterior Materials SUS304/316, Plexiglass, POM

Flow rate 20ml/min, cleaning flow rate 0.1-1l/min (the cleaning flow rate varies with the pressure of the sample source)

Particle size range(4-channel, standard) ); ≥0.04μm; ≥0.08μm; ≥≥0.1μm;  ≥0.15μm

Optional Channels 2-10 channels, set by the controller, the setting range is 0.04~0.15μm. 

Particle count 15000pcs/ml, error value less than 10%

Particle count 15000/ml, error value less than 10%

Dimensions. Weight 203(H) X 385(W) X 570(D)mm (except protruding part) Approx. 24.8kg