RION/Japan's Liquid Particle Counters detect a wide range of liquids from pure water to hydrofluoric acid. Liquid counters are used to control particles in chemicals such as specialized materials for semiconductor processes such as SOG and photoresist materials, ultrapure water and cleaning chemicals such as alkalis, organic solvents and hydrofluoric acid. In addition, abrasive fluids with large particle sizes for chemical mechanical polishing can also be tested, both on-line and off-line.

Featured Benefits

Particle size range (4 channels, standard); ≥0.04μm;  ≥0.08μm;  ≥0.1μm;  ≥0.15μm

Optional channels 2-10 channels, set by the controller, setting range:0.04~0.15μm

Number of particles 15000/ml, error value less than 10%

Technical parameters

Light source Laser diode pump/solid-state crystal laser (wavelength:532nm, rated output:500mW)

Materials in Contact with Samples Synthetic quartz, fluorocarbon rubber, fluoroplastic, PMC

Exterior Material SUS304/316, Plexiglass, POM

Flow rate 20ml/min, cleaning flow rate 0.1-1l/min

Particle size range (4 channels);≥0.04μm;   ≥0.08μm;   ≥0.1μm;   ≥0.15μm

Particle number 15000/ml, error value less than 10%

Power supply 100V-240V AC,50/60Hz 130VA

Dimensions. Weight 203(H)X 385(W) X 570(D)mm (except protruding part) Approx. 24.8kg