RION/Japan's Liquid Particle Counters detect a wide range of liquids from pure water to hydrofluoric acid. Liquid counters are used to control particles in chemicals such as specialized materials for semiconductor processes such as SOG and photoresist materials, ultrapure water and cleaning chemicals such as alkalis, organic solvents and hydrofluoric acid. In addition, abrasive fluids with large particle sizes for chemical mechanical polishing can also be tested, both on-line and off-line.
 

Featured Benefits

Particle size range (4 channels): ?0.15µm,?0.2µm,?0.3µm,?0.5µm

Optional Channels: 1-10 channels, set by the controller, Setting range: 0.15~0.5µm

Optional Channels: 1-10 channels, set by the controller, Setting range: 0.15~0.5µm

Technical parameters

Light source. Laser diode (wavelength 830nm, rated output 200mW)

Flow Rate: 100ml per min

Particle size range (4 channels): ?0.15™ amp;micro;m,?0.2µm,?0.3µm,?0.5µm