RION/Japan's liquid particle counter can detect a variety of liquids from pure water to hydrofluoric acid. Liquid counters are used to control particles in chemicals, such as special materials in semiconductor processes such as SOG and photoresist materials, ultrapure water and cleaning chemicals such as alkali, organic solvents and hydrofluoric acid. In addition, it can also detect large-particle grinding liquids in chemical mechanical polishing, and the test methods include online and offline testing.
 

Features and advantages

Particle size range (4 channels): ≧0.15µm,≧0.2µm,≧0.3µm,≧0.5µm

Optional channels: 1-10 channels, set by the controller, setting range: 0.15~0.5µm

Technical parameters

Light source: Laser diode (wavelength 830nm, rated output 200mW)

Laser material: artificial quartz PFA

Flow rate: 100ml/min

Particle size range (4 channels): ≧0.15µm,≧0.2µm,≧0.3µm,≧0.5µm

Optional channels: 1-10 channels, set by the controller, setting range: 0.15~0.5µm

Number of particles: 1200 particles/ml

Power supply: DC12V (supplied by KE-40B1)

Dimensions. Weight: 160×300×250mm, approximately: 7.5kg