RION/Japan's liquid particle counter can detect a variety of liquids from pure water to hydrofluoric acid. Liquid counters are used to control particles in chemicals, such as special materials in semiconductor processes such as SOG and photoresist materials, ultrapure water and cleaning chemicals such as alkali, organic solvents and hydrofluoric acid. In addition, it can also detect large-particle grinding liquids in chemical mechanical polishing, and the test methods include online and offline testing.
 

Features and advantages

Particle size range (4 channels, standard); ≥0.05μm;  ≥0.1μm;  ≥0.15μm;  ≥0.2μm

Optional channels 2-10 channels, set by the controller, setting range: 0.05~0.2μm

Technical parameters

Light source laser diode pump/solid-state crystal laser (wavelength: 830nm, rated output: 200mW)

Material of the part in contact with the sample Artificial quartz, fluorocarbon rubber, fluoroplastic, PMC

External material SUS304/316, organic glass, POM

Flow rate 10ml/min, cleaning flow rate 0.1-1l/min (cleaning flow rate varies with the pressure of the sample source)

Particle size range (4 channels) ≥0.05µm,≥0.1µm,≥0.15µm,≥0.2µm standard

Optional channels 2-10 channels, set by the controller, setting range: 0.05~0.2µm

Number of particles 200000 particles/ml, error value less than 10%

Power supply 100V-240V AC, 50/60Hz 130VA

Dimensions. Weight 230 (H) X 330 (W) X 570 (D) mm (excluding protruding parts) about 19.8 kg