RION/Japan's Liquid Particle Counters detect a wide range of liquids from pure water to hydrofluoric acid. Liquid counters are used to control particles in chemicals such as specialized materials for semiconductor processes such as SOG and photoresist materials, ultrapure water and cleaning chemicals such as alkalis, organic solvents and hydrofluoric acid. Additionally, large particle sizes in abrasive solutions for chemical mechanical polishing are also tested, both on- and off-line.
粒径范围(4通道,标配); ≥0.05μm; ≥0.1μm; ≥0.15μm; ≥0.2μm Optional channels 2-10 channels, set by the controller, setting range: 0.05~0.2μm Light Source Laser Diode Pump/Solid State Crystal Laser (Wavelength: 830nm, Rated Output:200mW) Materials in contact with the sample Artificial quartz, Viton, fluorine rubber, PMCTechnical Parameters
Materials in contact with the sample Artificial quartz, Viton, fluorine rubber, PMC
Exterior Materials SUS304/316, Plexiglass, POM
Flow rate 10ml/min, cleaning flow rate 0.1-1l/min (the cleaning flow rate varies with the pressure of the sample source)
粒径范围(4通道) ≥0.05µm,≥0.1µm,≥0.15µm,& amp;amp;ge;0.2µm standard
Optional channels 2-10 channels, set by the controller, setup range:0.05~14px. Range:0.05~0.2µm
Particle count 200000pcs/ml, error value less than 10%< gt;Power supply 100V-240V AC,50/60Hz 130VA
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