RION/Japan's Liquid Particle Counters detect a wide range of liquids from pure water to hydrofluoric acid. Liquid counters are used to control particles in chemicals such as specialized materials for semiconductor processes such as SOG and photoresist materials, ultrapure water and cleaning chemicals such as alkalis, organic solvents and hydrofluoric acid. In addition, abrasive fluids with large particle sizes for chemical mechanical polishing can also be tested, both on-line and off-line.
 

Featured Benefits

Measurement range 2 channels; ≥0.05μm;  ≥0.1μm (four channels require factory setting)<

Maximum number of particles 100000 per ml (error value less than 5%)

Technical Parameters

Light source laser diode (wavelength:830nm, rated output:200mW)<

Part of the material Artificial quartz, Viton, PFA

Part of the material Artificial quartz, Viton, PFA

Flow rate Test flow rate 10ml/minute

Measuring range 2 channels; ≥0.05μm;  ;; ≥0.1μm (four channels require factory setting)

Maximum number of particles 100000/ml (error value less than 5%)

Maximum number of particles 100000/ml (error value less than 5%)

Power supply 100V~240V AC, (including power supply KZ-50)

Dimensions. Weight 160(H) X 300(W) X 250 (D) mm, Approx:6kg