RION/Japan's Liquid Particle Counters detect a wide range of liquids from pure water to hydrofluoric acid. Liquid counters are used to control particles in chemicals such as specialized materials for semiconductor processes such as SOG and photoresist materials, ultrapure water and cleaning chemicals such as alkalis, organic solvents and hydrofluoric acid. In addition, abrasive fluids with large particle sizes for chemical mechanical polishing can also be tested, both on-line and off-line.

Featured Advantages

Measuring range 2 channels;   ≥0.2μm; ≥0.5μm. span>

Maximum number of particles 1200/ml (error value less than 5%)

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Technical Parameters

Light Source Laser Diode (Wavelength: 780nm, Rated Output: 40mW)

Light Source Laser Diode (Wavelength: 780nm, Rated Output: 40mW)

Part of the material KL-28B: Artificial Quartz, PFA, PTEF

& lt;span style="font-size:14px;">KS-16F: Sapphire, PFA, PTEF (Hydrofluoric Acid Measurable)

Flow rate Test flow 10ml/minute

Measuring range 2 channels ; ≥0.2μm; ≥0.5μm

Power supply from KE-28B, 100V AC,23VA< /span>

Dimensions. Weight 70(H)  X  85(W) X 118 (D) mm, Approx.:0.6kg

Controller KE-28B (for KL-28B/KL-28BF)