RION/Japan's liquid particle counter can detect a variety of liquids from pure water to hydrofluoric acid. Liquid counters are used to control particles in chemicals, such as special materials in semiconductor processes such as SOG and photoresist materials, ultrapure water and cleaning chemicals such as alkali, organic solvents and hydrofluoric acid. In addition, it can also detect large-particle grinding liquids in chemical mechanical polishing, and the test methods include online and offline testing.

Features and advantages

Measurement range 2 channels;   ≥0.2μm; ≥0.5μm

Maximum number of particles 1200 particles/ml (error value less than 5%)

Technical parameters

Light source Laser diode (wavelength: 780nm, rated output: 40mW)

Partial materials KL-28B: artificial quartz, PFA, PTEF

KS-16F: sapphire, PFA, PTEF (measuring hydrofluoric acid)

Flow rate Test flow rate 10ml/min

Measurement range 2 channels ; ≥0.2μm; ≥0.5μm

Maximum number of particles 1200 granules/ml (error value less than 5%)

Power supply supplied by KE-28B, 100V AC, 23VA

Dimensions. Weight 70(H)  X  85(W) X 118 (D) mm, approx.: 0.6kg

Controller KE-28B (dedicated to KL-28B/KL-28BF)