RION/Japan's Liquid Particle Counters detect a wide range of liquids from pure water to hydrofluoric acid. Liquid counters are used to control particles in chemicals such as specialized materials for semiconductor processes such as SOG and photoresist materials, ultrapure water and cleaning chemicals such as alkalis, organic solvents and hydrofluoric acid. In addition, abrasive fluids with large particle sizes for chemical mechanical polishing can also be tested, both on-line and off-line.

Featured Advantages

Measurement range 5 channels;  ≥0.1μm;  ≥0.15μm;  ≥0.2μm; ≥0.3μm;  ≥0.5μm. span>

Maximum number of particles 30,000/ml (error value less than 5%)

Technical Parameters

Light Source Laser Diode (Wavelength:830nm, Rated Output:200mW)

Light Source Laser Diode (Wavelength:830nm, Rated Output:200mW)

Part of the material Artificial quartz, stainless steel, fluorine plastic

Part of the material Artificial quartz, stainless steel, fluorine plastic

Flow rate Test flow rate 100ml/minute

>Measuring range 5 channels;  ≥0.1μm;  ≥0.15μm;  ≥0.2μm;  ≥0.3μm;   ≥0.5μm

Maximum number of particles 30,000 particles/ml (error value Less than 5%)

Power Supply 100V~240V AC,40VA(Including Power Supply KZ-50)

Dimensions. Weight 135(H) X 280(W) X 150 (D) mm, Approx:6.5kg